Pandey Electronics (Dec. 11, 2010) — Panasonic and imec present at the International Electron Devices Meeting in San Francisco an innovative SiGe (silicon germanium) thin film packaged SOI-based MEMS resonator featuring an industry-record Q factor combined with a low bias voltage. The high Q factor was achieved by implementing a resonator that operates in a torsional vibration mode, and, by vacuum encapsulation of the resonator in a thin film package.
This groundbreaking resonator paves the way towards miniaturization and low power consumption of timing devices used in a variety of applications such as consumer electronics and automotive electronics.
MEMS resonators offer enhanced miniaturization over conventional resonators such as quartz crystals and piezoelectric ceramics. However, state-of-the art MEMS resonators suffer from a low Q factor and a high bias voltage. Panasonic and imec developed a novel packaged MEMS resonator achieving the highest Q factor reported in the industry until now (220,000 at a resonant frequency f=20MHz (f•Q product of 4.3X1012Hz)) and low bias voltage by combining different advanced MEMS technologies.
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